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| University of California Riverside | Center for Nanoscale Science & Engineering (CNSE), Bourns Hall Cleanroom | ||||||||||||||||||||
| Project Features: > Bourns Hall Renovation > Class 100 and Class 1,000 Cleanroom > Characterization Area > Remodel and Upgrade of Facilities Support Areas > E-Beam Lithography |
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| Services Provided by AGI for Project: > Cleanroom and Characterization Programming > Design and Construction Support (Design-Build Project) > Site and Facilities Survey > Layout, Utility Matrix, HPM Analysis > Permitting Support > Tool Research and Negotiation > Vibration and EMI Consulting and Abatement > Recommendations > Operational Financial Modeling for the Center > Process Engineering Support for the Tool Evaluation, > Acceptance, and Start-up |
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| Building Uses: > Multidisciplinary Nanotechnology Research > Provides the committed users a convenient, safe and > technologically advanced laboratory within which to conduct > research in nanoscale science and engineering. > Fabrication of silicon-based CMOS, FET transistors and > MEMS devices or variants of these devices with novel > materials and process sequences. |
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| Key AGI Personnel: > Abbie Gregg, Cleanroom Consultant > Craig Rossrucker, Cleanroom Consultant > Mark Strnad, Cleanroom Consultant > Mei Rong Yen, Cleanroom Consultant > Victor Rivas, Ph.D., Cleanroom Consultant |
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